data/data_items.yaml
ABS:
type: Binary
description: Any binary string
ACKA:
type: Boolean
description: Request success
length: 1
values:
true: Success
false: Failed
ACKC5:
type: Binary
description: Acknowledge code for stream 5
length: 1
values:
0:
description: Accepted
constant: ACCEPTED
1-63:
description: Error
constant: ERROR
ACKC6:
type: Binary
description: Acknowledge code for stream 6
length: 1
values:
0:
description: Accepted
constant: ACCEPTED
1-63:
description: Error
constant: ERROR
ACKC7:
type: Binary
description: Acknowledge code for stream 7
length: 1
values:
0:
description: Accepted
constant: ACCEPTED
1:
description: Permission not granted
constant: NO_PERMISSION
2:
description: Length error
constant: LENGTH_ERROR
3:
description: Matrix overflow
constant: MATRIX_OVERFLOW
4:
description: PPID not found
constant: PPID_NOT_FOUND
5:
description: Mode unsupported
constant: MODE_UNSUPPORTED
6:
description: Performed later
constant: PERFORMED_LATER
7-63:
description: Reserved
ACKC10:
type: Binary
description: Acknowledge code for stream 10
length: 1
values:
0:
description: Accepted
constant: ACCEPTED
1:
description: Will not be displayed
constant: NOT_DISPLAYED
2:
description: Terminal not available
constant: TERMINAL_NOT_AVAILABLE
3-63:
description: Other error
ALCD:
type: Binary
description: Alarm code byte
length: 1
values:
0:
description: Not used
1:
description: Personal safety
constant: PERSONAL_SAFETY
2:
description: Equipment safety
constant: EQUIPMENT_SAFETY
3:
description: Parameter control warning
constant: PARAMETER_CONTROL_WARNING
4:
description: Parameter control error
constant: PARAMETER_CONTROL_ERROR
5:
description: Irrecoverable error
constant: IRRECOVERABLE_ERROR
6:
description: Equipment status warning
constant: EQUIPMENT_STATUS_WARNING
7:
description: Attention flags
constant: ATTENTION_FLAGS
8:
description: Data integrity
constant: DATA_INTEGRITY
9-63:
description: Other catogeries
128:
description: Alarm set flag
constant: ALARM_SET
ALED:
type: Binary
description: Alarm en-/disable code byte
length: 1
values:
0:
description: Disable
constant: DISABLE
1-127:
description: Not used
128:
description: Enable
constant: ENABLE
129-255:
description: Not used
ALID:
type:
- U1
- U2
- U4
- U8
- I1
- I2
- I4
- I8
description: Alarm ID
ALTX:
type: String
description: Alarm text
length: 120
ATTRDATA:
type:
- Array
- Boolean
- U1
- U2
- U4
- U8
- I1
- I2
- I4
- I8
- F4
- F8
- String
- Binary
description: Object attribute value
ATTRID:
type:
- U1
- U2
- U4
- U8
- String
description: Object attribute identifier
ATTRRELN:
type: U1
description: Attribute relation to attribute of object
values:
0:
description: Equal to
constant: EQUAL
1:
description: Not equal to
constant: NOT_EQUAL
2:
description: Less than
constant: LESS
3:
description: Less than or equal to
constant: LESS_EQUAL
4:
description: More than
constant: MORE
5:
description: More than or equal to
constant: MORE_EQUAL
6:
description: Value present
constant: PRESENT
7:
description: Value absent
constant: ABSENT
8-63:
description: Error
BCEQU:
type:
- U1
- String
description: Bin code equivalents
BINLT:
type:
- U1
- String
description: Bin list
CEED:
type: Boolean
description: Collection event or trace enable/disable code
length: 1
values:
true: Enable
false: Disable
CEID:
type:
- U1
- U2
- U4
- U8
- I1
- I2
- I4
- I8
- String
description: Collection event ID
CENAME:
type: String
description: Collection event Name
CEPACK:
type: Binary
description: Command enhanced parameter acknowledge
values:
0:
description: No error
constant: NO_ERROR
1:
description: CPNAME name does not exist
constant: CPNAME_UNKNOWN
2:
description: Illegal value for CEPVAL
constant: CEPVAL_ILLEGAL_VALUE
3:
description: Illegal format for CEPVAL
constant: CEPVAL_ILLEGAL_FORMAT
4:
description: CPNAME not valid as used
constant: CPNAME_INVALID
5-63:
description: Reserved
CEPVAL:
type:
- Array
- Boolean
- U1
- U2
- U4
- U8
- I1
- I2
- I4
- I8
- F4
- F8
- String
- Binary
description: Command enhanced parameter value
CMDA:
type:
- U1
- I1
description: Command acknowledged code
values:
0:
description: Completed or done
constant: DONE
1:
description: Command does not exist
constant: COMMAND_UNKNOWN
2:
description: Cannot perform now
constant: NOT_NOW
3-63:
description: Reserved, equipment specific error
COLCT:
type:
- U1
- U2
- U4
- U8
description: Column count in dies
COMMACK:
type: Binary
description: Establish communications acknowledge
length: 1
values:
0:
description: Accepted
constant: ACCEPTED
1:
description: Denied, Try Again
constant: DENIED
2-63:
description: Reserved
CPACK:
type: Binary
description: Command parameter acknowledge code
length: 1
values:
1:
description: Parameter name unknown
constant: PARAMETER_UNKNOWN
2:
description: CPVAL value illegal
constant: CPVAL_ILLEGAL_VALUE
3:
description: CPVAL format illegal
constant: CPVAL_ILLEGAL_FORMAT
4-63:
description: Reserved
CPNAME:
type:
- U1
- U2
- U4
- U8
- I1
- I2
- I4
- I8
- String
description: Command parameter name
CPVAL:
type:
- Boolean
- U1
- U2
- U4
- U8
- I1
- I2
- I4
- I8
- String
- Binary
description: Command parameter value
DATAID:
type:
- U1
- U2
- U4
- U8
- I1
- I2
- I4
- I8
- String
description: Data ID
DATALENGTH:
type:
- U1
- U2
- U4
- U8
- I1
- I2
- I4
- I8
description: Length of data to be sent
DATLC:
type: U1
description: Data location
DRACK:
type: Binary
description: Define report acknowledge code
length: 1
values:
0:
description: Acknowledge
constant: ACK
1:
description: Denied, insufficient space
constant: INSUFFICIENT_SPACE
2:
description: Denied, invalid format
constant: INVALID_FORMAT
3:
description: Denied, RPTID already defined
constant: RPTID_REDEFINED
4:
description: Denied, VID doesn't exist
constant: VID_UNKNOWN
5-63:
description: Reserved, other errors
DSID:
type:
- U1
- U2
- U4
- U8
- I1
- I2
- I4
- I8
- String
description: Data set ID
DSPER:
type: String
description: Data sample period
DUTMS:
type: String
description: Die units of measure
DVNAME:
type:
- U1
- U2
- U4
- U8
- I1
- I2
- I4
- I8
- String
description: Data value name
DVVAL:
type:
- Array
- Boolean
- U1
- U2
- U4
- U8
- I1
- I2
- I4
- I8
- F4
- F8
- String
- Binary
description: Data value
DVVALNAME:
type: String
description: Data value name
EAC:
type: Binary
description: Equipment acknowledge code
length: 1
values:
0:
description: Acknowledge
constant: ACK
1:
description: Denied, not all constants exist
constant: INVALID_CONSTANT
2:
description: Denied, busy
constant: BUSY
3:
description: Denied, constant out of range
constant: OUT_OF_RANGE
4-63:
description: Reserved, equipment specific
ECDEF:
type:
- Boolean
- I8
- I1
- I2
- I4
- F8
- F4
- U8
- U1
- U2
- U4
- String
- Binary
description: Equipment constant default value
ECID:
type:
- U1
- U2
- U4
- U8
- I1
- I2
- I4
- I8
- String
description: Equipment constant ID
ECMAX:
type:
- Boolean
- I8
- I1
- I2
- I4
- F8
- F4
- U8
- U1
- U2
- U4
- String
- Binary
description: Equipment constant maximum value
ECMIN:
type:
- Boolean
- I8
- I1
- I2
- I4
- F8
- F4
- U8
- U1
- U2
- U4
- String
- Binary
description: Equipment constant minimum value
ECNAME:
type: String
description: Equipment constant name
ECV:
type:
- Array
- Boolean
- I8
- I1
- I2
- I4
- F8
- F4
- U8
- U1
- U2
- U4
- String
- Binary
description: Equipment constant value
EDID:
type:
- U1
- U2
- U4
- U8
- I1
- I2
- I4
- I8
- String
- Binary
description: Expected data identification
ERACK:
type: Binary
description: Enable/disable event report acknowledge
length: 1
values:
0:
description: Accepted
constant: ACCEPTED
1:
description: Denied, CEID doesn't exist
constant: CEID_UNKNOWN
2-63:
description: Reserved
ERRCODE:
type:
- I1
- I2
- I4
- I8
description: Code identifying an error
values:
0:
description: No error
1:
description: Unknown object in Object Specifier
2:
description: Unknown target object type
3:
description: Unknown object instance
4:
description: Unknown attribute name
5:
description: Read-only attribute - access denied
6:
description: Unknown object type
7:
description: Invalid attribute value
8:
description: Syntax error
9:
description: Verification error
10:
description: Validation error
11:
description: Object identifier in use
12:
description: Parameters improperly specified
13:
description: Insufficient parameters specified
14:
description: Unsupported option requested
15:
description: Busy
16:
description: Not available for processing
17:
description: Command not valid for current state
18:
description: No material altered
19:
description: Material partially processed
20:
description: All material processed
21:
description: Recipe specification related error
22:
description: Failed during processing
23:
description: Failed while not processing
24:
description: Failed due to lack of material
25:
description: Job aborted
26:
description: Job stopped
27:
description: Job cancelled
28:
description: Cannot change selected recipe
29:
description: Unknown event
30:
description: Duplicate report ID
31:
description: Unknown data report
32:
description: Data report not linked
33:
description: Unknown trace report
34:
description: Duplicate trace ID
35:
description: Too many data reports
36:
description: Sample period out of range
37:
description: Group size too large
38:
description: Recovery action currently invalid
39:
description: Busy with another recovery currently unable to perform the recovery
40:
description: No active recovery action
41:
description: Exception recovery failed
42:
description: Exception recovery aborted
43:
description: Invalid table element
44:
description: Unknown table element
45:
description: Cannot delete predefined
46:
description: Invalid token
47:
description: Invalid parameter
48:
description: Load port does not exist
49:
description: Load port already in use
50:
description: Missing Carrier
51-63:
description: Reserved
64-32767:
description: User defined
32768:
description: Action will be performed at earliest opportunity
32769:
description: Action can not be performed now
32770:
description: Action failed due to errors
32771:
description: Invalid command
32772:
description: Client Already Connected
32773:
description: Duplicate ClientID
32774:
description: Invalid ClientType
32775:
description: IncompatibleVersions
32776:
description: Unrecognized ClientID (Client not currently connected)
32777:
description: Failed (Completed Unsuccessfully)
32778:
description: Failed (Unsafe) — External intervention required
32779:
description: Sensor-Detected Obstacle
32780:
description: Material Not Sent
32781:
description: Material Not Received
32782:
description: Material Lost
32783:
description: Hardware Failure
32784:
description: Transfer Cancelled
32785-32792:
description: reserved for future use
32793-65535:
description: Reserved
ERRTEXT:
type: String
description: Error description for error code
length: 120
EXID:
type: String
description: Exception identifier
length: 20
EXMESSAGE:
type: String
description: Exception message
EXRECVRA:
type: String
description: Exception recovery action
length: 40
EXTYPE:
type: String
description: Exception type
FCNID:
type: U1
description: Function ID
length: 1
FFROT:
type: U2
description: Film frame rotation
help: In degrees from the bottom CW. (Bottom equals zero degrees.) Zero length indicates not used.
FNLOC:
type: U2
description: Flat/notch location
help: In degrees from the bottom CW. (Bottom equals zero degrees.) Zero length indicates not used.
GRANT6:
type: Binary
description: Permission to send
length: 1
values:
0:
description: Granted
constant: GRANTED
1:
description: Busy
constant: BUSY
2:
description: Not interested
constant: NOT_INTERESTED
3-63:
description: Other error
GRNT1:
type: Binary
description: Grant code
length: 1
values:
0:
description: Acknowledge
constant: ACK
1:
description: Busy, try again
constant: BUSY
2:
description: No space
constant: NO_SPACE
3:
description: Map too large
constant: MAP_TOO_LARGE
4:
description: Duplicate ID
constant: DUPLICATE_ID
5:
description: Material ID not found
constant: MATERIALID_UNKNOWN
6:
description: Unknown map format
constant: UNKNOWN_MAP_FORMAT
7-63:
description: Reserved, error
HCACK:
type: Binary
description: Host command parameter acknowledge code
length: 1
values:
0:
description: Acknowledge
constant: ACK
1:
description: Denied, invalid command
constant: INVALID_COMMAND
2:
description: Denied, cannot perform now
constant: CANT_PERFORM_NOW
3:
description: Denied, parameter invalid
constant: PARAMETER_INVALID
4:
description: Acknowledge, will finish later
constant: ACK_FINISH_LATER
5:
description: Rejected, already in condition
constant: ALREADY_IN_CONDITION
6:
description: No such object
constant: NO_OBJECT
7-63:
description: Reserved
IDTYP:
type: Binary
description: ID type
length: 1
values:
0:
description: Wafer ID
constant: WAFER
1:
description: Wafer cassette ID
constant: WAFER_CASSETTE
2:
description: Film frame ID
constant: FILM_FRAME
3-63:
description: Reserved, error
LENGTH:
type:
- U1
- U2
- U4
- U8
- I1
- I2
- I4
- I8
description: Service/process program length
LIMITACK:
type: Binary
description: Acknowledgement code for variable limit
length: 1
values:
0:
description: OK
constant: OK
1:
description: LIMITID does not exist
constant: LIMITID_UNKNOWN
2:
description: UPPERDB > LIMITMAX
constant: UPPERDB_MORE_LIMITMAX
3:
description: LOWERDB < LIMITMIN
constant: LOWERDB_LESS_LIMITMIN
4:
description: UPPERDB < LOWERDB
constant: UPPERDB_LESS_LOWERDB
5:
description: Illegal format UPPER-/LOWERDB
constant: ILLEGAL_FORMAT
6:
description: Illegal ASCII value
constant: ASCII_ILLEGAL
7:
description: Duplicate limit definition
constant: DUPLICATE
8-63:
description: Reserved, equipment specific error
LIMITID:
type: Binary
description: Limit ID
length: 1
LIMITMAX:
type:
- Boolean
- U1
- U2
- U4
- U8
- I1
- I2
- I4
- I8
- F4
- F8
- String
description: Maximum allowed for limit
length: 1
LIMITMIN:
type:
- Boolean
- U1
- U2
- U4
- U8
- I1
- I2
- I4
- I8
- F4
- F8
- String
description: Minimum allowed for limit
length: 1
LOWERDB:
type:
- Boolean
- U1
- U2
- U4
- U8
- I1
- I2
- I4
- I8
- F4
- F8
- String
description: Limit for variable lower deadband
length: 1
LRACK:
type: Binary
description: Link report acknowledge code
length: 1
values:
0:
description: Acknowledge
constant: ACK
1:
description: Denied, insufficient space
constant: INSUFFICIENT_SPACE
2:
description: Denied, invalid format
constant: INVALID_FORMAT
3:
description: Denied, CEID already linked
constant: CEID_LINKED
4:
description: Denied, CEID doesn't exist
constant: CEID_UNKNOWN
5:
description: Denied, RPTID doesn't exist
constant: RPTID_UNKNOWN
6-63:
description: Reserved, other errors
LVACK:
type: Binary
description: Acknowledgement code for variable limit
length: 1
values:
0:
description: OK
constant: OK
1:
description: Variable does not exist
constant: VARIABLE_UNKNOWN
2:
description: Variable has no limits
constant: NO_LIMITS
3:
description: Variable repeated
constant: DUPLICATE_VARIABLE
4:
description: Limit value error
constant: LIMIT_ERROR
5-63:
description: Reserved
MAPER:
type: Binary
description: Map error
length: 1
values:
0:
description: ID not found
constant: ID_UNKNOWN
1:
description: Invalid data
constant: INVALID_DATA
2:
description: Format error
constant: FORMAT_ERROR
3-63:
description: Invalid error
MAPFT:
type: Binary
description: Map data format
length: 1
values:
0:
description: Row format
constant: ROW
1:
description: Array format
constant: ARRAY
2:
description: Coordinate format
constant: COORDINATE
3-63:
description: Error
MDACK:
type: Binary
description: Map data acknowledge
length: 1
values:
0:
description: Map received
constant: ACK
1:
description: Format error
constant: FORMAT_ERROR
2:
description: No ID match
constant: UNKNOWN_ID
3:
description: Abort/discard map
constant: ABORT_MAP
4-63:
description: Reserved, error
MDLN:
type: String
description: Equipment model type
length: 20
MEXP:
type: String
description: Message expected
length: 6
MHEAD:
type: Binary
description: SECS message header
length: 10
MID:
type:
- String
- Binary
description: Material ID
length: 80
MLCL:
type:
- U1
- U2
- U4
- U8
description: Message length
NULBC:
type:
- U1
- String
description: Column count in dies
OBJACK:
type: U1
description: Object acknowledgement code
length: 1
values:
0:
description: Successful
constant: SUCCESSFUL
1:
description: Error
constant: ERROR
2-63:
description: Reserved
OBJID:
type:
- U1
- U2
- U4
- U8
- String
description: Object identifier
OBJSPEC:
type: String
description: Specific object instance
OBJTYPE:
type:
- U1
- U2
- U4
- U8
- String
description: Class of object identifier
OFLACK:
type: Binary
description: Acknowledge code for OFFLINE request
length: 1
values:
0:
description: OFFLINE Acknowledge
constant: ACK
1-63:
description: Reserved
ONLACK:
type: Binary
description: Acknowledge code for ONLINE request
length: 1
values:
0:
description: ONLINE Accepted
constant: ACCEPTED
1:
description: ONLINE Not allowed
constant: NOT_ALLOWED
2:
description: Already ONLINE
constant: ALREADY_ON
3-63:
description: Reserved
ORLOC:
type: Binary
description: Origin location
length: 1
values:
0:
description: Center die of wafer
constant: CENTER_DIE
1:
description: Upper right
constant: UPPER_RIGHT
2:
description: Upper left
constant: UPPER_LEFT
3:
description: Lower left
constant: LOWER_LEFT
4:
description: Lower right
constant: LOWER_RIGHT
5-63:
description: Reserved, error
PPBODY:
type:
- U1
- U2
- U4
- U8
- I1
- I2
- I4
- I8
- String
- Binary
description: Status variable ID
PPGNT:
type: Binary
description: Process program grant status
length: 1
values:
0:
description: OK
constant: OK
1:
description: Already have
constant: ALREADY_HAVE
2:
description: No space
constant: NO_SPACE
3:
description: Invalid PPID
constant: INVALID_PPID
4:
description: Busy, try later
constant: BUSY
5:
description: Will not accept
constant: WILL_NOT_ACCEPT
6-63:
description: Reserved, other errors
PPID:
type:
- String
- Binary
description: Process program ID
length: 120
PRAXI:
type: Binary
description: Process axis
length: 1
values:
0:
description: Rows, top, increasing
constant: ROWS_TOP_INCR
1:
description: Rows, top, decreasing
constant: ROWS_TOP_DECR
2:
description: Rows, bottom, increasing
constant: ROWS_BOT_INCR
3:
description: Rows, bottom, decreasing
constant: ROWS_BOT_DECR
4:
description: Columns, left, increasing
constant: COLS_LEFT_INCR
5:
description: Columns, left, decreasing
constant: COLS_LEFT_DECR
6:
description: Columns, right, increasing
constant: COLS_RIGHT_INCR
7:
description: Columns, right, decreasing
constant: COLS_RIGHT_DECR
8-63:
description: Error
PRDCT:
type:
- U1
- U2
- U4
- U8
description: Process die count
RCMD:
type:
- U1
- I1
- String
description: Remote command
REFP:
type:
- I1
- I2
- I4
- I8
description: Reference point
REPGSZ:
type:
- I1
- I2
- I4
- I8
- U1
- U2
- U4
- U8
- String
description: Report grouping size
ROWCT:
type:
- U1
- U2
- U4
- U8
description: Row count in dies
RPSEL:
type: U1
description: Reference point select
RPTID:
type:
- U1
- U2
- U4
- U8
- I1
- I2
- I4
- I8
- String
description: Report ID
RSDA:
type: Binary
description: Request spooled data acknowledge
length: 1
values:
0:
description: OK
constant: ACK
1:
description: Denied, busy try later
constant: DENIED_BUSY
2:
description: Denied, spooled data does not exist
constant: DENIED_NO_DATA
3-63:
description: Reserved
RSDC:
type: U1
description: Request spooled data command
length: 1
values:
0:
description: Transmit spooled messages
constant: TRANSMIT
1:
description: Purge spooled messages
constant: PURGE
2-63:
description: Reserved
RSINF:
type:
- I1
- I2
- I4
- I8
description: Starting location
length: 3
RSPACK:
type: Binary
description: Reset spooling acknowledge
length: 1
values:
0:
description: Acknowledge, spooling setup accepted
constant: ACK
1:
description: Spooling setup rejected
constant: REJECTED
2-63:
description: Reserved
SDACK:
type: Binary
description: Map setup acknowledge
length: 1
values:
0:
description: Received Data
constant: ACK
1-63:
description: Error
SDBIN:
type: Binary
description: Send bin information
length: 1
values:
0:
description: Send bin information
constant: SEND
1:
description: Don't send bin infomation
constant: DONT_SEND
2-63:
description: Reserved
SHEAD:
type: Binary
description: SECS message header
length: 10
SMPLN:
type:
- I1
- I2
- I4
- I8
- U1
- U2
- U4
- U8
description: Sample number
SOFTREV:
type: String
description: Software revision
length: 20
STIME:
type: String
description: Sample time
lenght: 32
STRACK:
type: Binary
description: Spool stream acknowledge
length: 1
values:
1:
description: Spooling not allowed for stream
constant: NOT_ALLOWED
2:
description: Stream unknown
constant: STREAM_UNKNOWN
3:
description: Unknown function for stream
constant: FUNCTION_UNKNOWN
4:
description: Secondary function for this stream
constant: SECONDARY
STRID:
type: U1
description: Stream ID
length: 1
STRP:
type:
- I1
- I2
- I4
- I8
description: Starting position
length: 2
SV:
type:
- Array
- Boolean
- U1
- U2
- U4
- U8
- I1
- I2
- I4
- I8
- F4
- F8
- String
- Binary
description: Status variable value
SVID:
type:
- U1
- U2
- U4
- U8
- I1
- I2
- I4
- I8
- String
description: Status variable ID
SVNAME:
type: String
description: Status variable name
TEXT:
type:
- U1
- U2
- U4
- U8
- I1
- I2
- I4
- I8
- String
- Binary
description: Line of characters
TIAACK:
type: Binary
description: Equipment acknowledgement code
length: 1
values:
0:
description: Everything correct
constant: OK
1:
description: Too many SVIDs
constant: SVID_EXCEEDED
2:
description: No more traces allowed
constant: TRACES_DENIED
3:
description: Invalid period
constant: INVALID_PERIOD
4:
description: Unknown SVID
constant: SVID_UNKNOWN
5:
description: Invalid REPGSZ
constant: REPGSZ_INVALID
6-63:
description: Reserved
TID:
type: Binary
description: Terminal ID
length: 1
TIME:
type: String
description: Time of day
length: 32
TIMESTAMP:
type: String
description: Timestamp
length: 32
TOTSMP:
type:
- I1
- I2
- I4
- I8
- U1
- U2
- U4
- U8
- String
description: Total samples
TRID:
type:
- I1
- I2
- I4
- I8
- U1
- U2
- U4
- U8
- String
description: Trace request ID
UNITS:
type: String
description: Units identifier
UPPERDB:
type:
- Boolean
- U1
- U2
- U4
- U8
- I1
- I2
- I4
- I8
- F4
- F8
- String
description: Limit for variable upper deadband
length: 1
V:
type:
- Array
- Boolean
- U1
- U2
- U4
- U8
- I1
- I2
- I4
- I8
- F4
- F8
- String
- Binary
description: Variable data
linter_message: " # pylint: disable=invalid-name"
VID:
type:
- U1
- U2
- U4
- U8
- I1
- I2
- I4
- I8
- String
description: Variable ID
VLAACK:
type: Binary
description: Variable limit attribute acknowledgement code
length: 1
values:
0:
description: Acknowledgement, command will be performed
constant: ACK
1:
description: Limit attribute definition error
constant: LIMIT_DEF_ERROR
2:
description: Cannot perform now
constant: NOT_NOW
3-63:
description: Reserved, equipment specific error
XDIES:
type:
- U1
- U2
- U4
- U8
- F4
- F8
description: Die size/index X-axis
XYPOS:
type:
- I1
- I2
- I4
- I8
description: X/Y coordinate position
length: 2
YDIES:
type:
- U1
- U2
- U4
- U8
- F4
- F8
description: Die size/index Y-axis